Granted Patent
Utility
US 6,184,489 · App. 09/290,636
Particle-removing apparatus for a semiconductor device manufacturing apparatus and method of removing particles
Inventors:
Natsuko Ito, Fumihiko Uesugi, Tsuyoshi Moriya
Patented Case
View Patent ↗
Granted: Feb 6, 2001
Filed: Apr 12, 1999
Inventors
Natsuko Ito
Fumihiko Uesugi
Tsuyoshi Moriya
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.