Granted Patent
Utility
US 6,184,525 · App. 09/205,441
Environmental SEM with a multiple fields for improved secondary electron detection
Inventor:
Karel Diederick Van Der Mast
Patented Case
View Patent ↗
Granted: Feb 6, 2001
Filed: Dec 4, 1998
Inventor
Karel Diederick Van Der Mast
Assignee (at issue)
Philips Electron Optics
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.