Granted Patent
Utility
US 6,185,322 · App. 08/958,095
Inspection system and method using separate processors for processing different information regarding a workpiece such as an electronic device
Inventors:
Seiji Ishikawa, Masao Sakata, Jun Nakazato, Sadao Shimoyashiro, Hiroto Nagatomo, Yuzo Taniguchi, Osamu Satou, Tsutomu Okabe, Yuzaburo Sakamoto, Kimio Muramatsu, Kazuhiko Matsuoka, Taizo Hashimoto, Yuichi Ohyama, Yutaka Ebara, Isao Miyazaki, Shuichi Hanashima
Patented Case
View Patent ↗
Granted: Feb 6, 2001
Filed: Oct 27, 1997
Inventors
Seiji Ishikawa
Masao Sakata
Jun Nakazato
Sadao Shimoyashiro
Hiroto Nagatomo
Yuzo Taniguchi
Osamu Satou
Tsutomu Okabe
Yuzaburo Sakamoto
Kimio Muramatsu
Kazuhiko Matsuoka
Taizo Hashimoto
Yuichi Ohyama
Yutaka Ebara
Isao Miyazaki
Shuichi Hanashima
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.