Granted Patent
Utility
US 6,187,616 · App. 09/402,891
Method for fabricating semiconductor device and heat treatment apparatus
Inventor:
Kozo Gyoda
Patented Case
View Patent ↗
Granted: Feb 13, 2001
Filed: Oct 13, 1999
Inventor
Kozo Gyoda
Assignee (at issue)
SEIKO EPSON CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.