Granted Patent
Utility
US 6,187,630 · App. 09/241,526
Method for forming hemispherical silicon grains on designated areas of silicon layer
Inventors:
Anchor Chen, Shih-Ching Chen
Patented Case
View Patent ↗
Granted: Feb 13, 2001
Filed: Feb 1, 1999
Inventors
Anchor Chen
Shih-Ching Chen
Assignee (at issue)
United Semiconductor Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.