Granted Patent
Utility
US 6,187,693 · App. 09/439,346
Heat treatment of a tantalum oxide film
Inventor:
Kenichi Koyanagi
Patented Case
View Patent ↗
Granted: Feb 13, 2001
Filed: Nov 15, 1999
Inventor
Kenichi Koyanagi
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.