Granted Patent
Utility
US 6,188,150 · App. 09/334,702
Light weight high-stiffness stage platen
Inventor:
Paul A. Spence
Patented Case
View Patent ↗
Granted: Feb 13, 2001
Filed: Jun 16, 1999
Inventor
Paul A. Spence
Assignee (at issue)
EUV LLC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.