Granted Patent
Utility
US 6,188,323 · App. 09/173,710
Wafer mapping system
Inventors:
Frederick T. Rosenquist, Bruce Richardson, William J. Fosnight, Anthony C. Bonora
Patented Case
View Patent ↗
Granted: Feb 13, 2001
Filed: Oct 15, 1998
Inventors
Frederick T. Rosenquist
Bruce Richardson
William J. Fosnight
Anthony C. Bonora
Assignee (at issue)
Asyst Technologies L.L.C.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.