Granted Patent
Utility
US 6,188,710 · App. 09/361,551
Narrow band gas discharge laser with gas additive
Inventors:
Herve A. Besaucele, Toshihiko Ishihara, Thomas Hofmann
Patented Case
View Patent ↗
Granted: Feb 13, 2001
Filed: Jul 27, 1999
Inventors
Herve A. Besaucele
Toshihiko Ishihara
Thomas Hofmann
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.