Granted Patent
Utility
US 6,189,481 · App. 08/355,009
Microwave plasma processing apparatus
Inventor:
Takeshi Akimoto
Patented Case
View Patent ↗
Granted: Feb 20, 2001
Filed: Dec 13, 1994
Inventor
Takeshi Akimoto
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.