Granted Patent
Utility
US 6,190,949 · App. 08/861,197
Silicon thin film, group of silicon single crystal grains and formation process thereof, and semiconductor device, flash memory cell and fabrication process thereof
Inventors:
Takashi Noguchi, Yasuhiro Kanaya, Masafumi Kunii, Yuji Ikeda, Setsuo Usui
Patented Case
View Patent ↗
Granted: Feb 20, 2001
Filed: May 21, 1997
Inventors
Takashi Noguchi
Yasuhiro Kanaya
Masafumi Kunii
Yuji Ikeda
Setsuo Usui
Assignee (at issue)
SONY GROUP CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.