IP Library Granted Patent US 6,190,949
Granted Patent Utility
US 6,190,949 · App. 08/861,197

Silicon thin film, group of silicon single crystal grains and formation process thereof, and semiconductor device, flash memory cell and fabrication process thereof

Inventors: Takashi Noguchi, Yasuhiro Kanaya, Masafumi Kunii, Yuji Ikeda, Setsuo Usui
Patented Case View Patent ↗
Granted: Feb 20, 2001 Filed: May 21, 1997
Inventors
Takashi Noguchi
Yasuhiro Kanaya
Masafumi Kunii
Yuji Ikeda
Setsuo Usui
Assignee (at issue)
SONY GROUP CORPORATION

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Quick Facts
Patent No.
US 6,190,949
App. No.
08/861,197
Filed
1997-05-21
Granted
2001-02-20
Kind
A