Granted Patent
Utility
US 6,190,973 · App. 09/215,797
Method of fabricating a high quality thin oxide
Inventors:
John E. Berg, Bernice L. Kickel, John Smythe
Patented Case
View Patent ↗
Granted: Feb 20, 2001
Filed: Dec 18, 1998
Inventors
John E. Berg
Bernice L. Kickel
John Smythe
Assignee (at issue)
Zilog, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.