Granted Patent
Utility
US 6,190,989 · App. 09/115,700
Method for patterning cavities and enhanced cavity shapes for semiconductor devices
Inventor:
Ceredig Roberts
Patented Case
View Patent ↗
Granted: Feb 20, 2001
Filed: Jul 15, 1998
Inventor
Ceredig Roberts
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.