Granted Patent
Utility
US 6,192,064 · App. 09/470,724
Narrow band laser with fine wavelength control
Inventors:
John M. Algots, Christopher A. Marchi, Frederick Erie, Jesse Buck, Alexander I. Ershov, Palash P. Das, Igor V. Fomenkov
Patented Case
View Patent ↗
Granted: Feb 20, 2001
Filed: Dec 22, 1999
Inventors
John M. Algots
Christopher A. Marchi
Frederick Erie
Jesse Buck
Alexander I. Ershov
Palash P. Das
Igor V. Fomenkov
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.