Granted Patent
Utility
US 6,200,480 · App. 09/006,409
Method of purifying photoacid generators for use in photoresist compositions
Inventors:
Lawrence Ferreira, Sanjay Malik
Patented Case
View Patent ↗
Granted: Mar 13, 2001
Filed: Jan 13, 1998
Inventors
Lawrence Ferreira
Sanjay Malik
Assignee (at issue)
Arch Specialty Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.