Granted Patent
Utility
US 6,200,902 · App. 09/050,944
Method of etching a layer in a semiconductor device
Inventor:
Akira Mitsuiki
Patented Case
View Patent ↗
Granted: Mar 13, 2001
Filed: Mar 31, 1998
Inventor
Akira Mitsuiki
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.