Granted Patent
Utility
US 6,200,908 · App. 09/366,815
Process for reducing waviness in semiconductor wafers
Inventors:
Roland R. Vandamme, Ankur H. Desai, Dale A. Witte, Yun-Biao Xin
Patented Case
View Patent ↗
Granted: Mar 13, 2001
Filed: Aug 4, 1999
Inventors
Roland R. Vandamme
Ankur H. Desai
Dale A. Witte
Yun-Biao Xin
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.