Granted Patent
Utility
US 6,201,219 · App. 09/030,309
Chamber and cleaning process therefor
Inventors:
Gurtej S. Sandhu, Ravi Iyer, Donald L. Westmoreland
Patented Case
View Patent ↗
Granted: Mar 13, 2001
Filed: Feb 25, 1998
Inventors
Gurtej S. Sandhu
Ravi Iyer
Donald L. Westmoreland
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.