IP Library Granted Patent US 6,201,629
Granted Patent Utility
US 6,201,629 · App. 09/138,367

Torsional micro-mechanical mirror system

Inventors: Robert W. McClelland, Noa M. Rensing, Mark B. Spitzer, Paul Aquilino, Paul M. Zavracky
Patented Case View Patent ↗
Granted: Mar 13, 2001 Filed: Aug 26, 1998
Inventors
Robert W. McClelland
Noa M. Rensing
Mark B. Spitzer
Paul Aquilino
Paul M. Zavracky
Assignees (at issue)
The Microoptical Corporation
Northwestern University

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Quick Facts
Patent No.
US 6,201,629
App. No.
09/138,367
Filed
1998-08-26
Granted
2001-03-13
Kind
A