Granted Patent
Utility
US 6,203,404 · App. 09/325,315
Chemical mechanical polishing methods
Inventors:
Michael J. Joslyn, Sidney B. Rigg
Patented Case
View Patent ↗
Granted: Mar 20, 2001
Filed: Jun 3, 1999
Inventors
Michael J. Joslyn
Sidney B. Rigg
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.