Granted Patent
Utility
US 6,203,611 · App. 09/421,187
Method of controlling growth of a semiconductor crystal to automatically transition from taper growth to target diameter growth
Inventors:
Steven L. Kimbel, Robert R. Wyand, III
Patented Case
View Patent ↗
Granted: Mar 20, 2001
Filed: Oct 19, 1999
Inventors
Steven L. Kimbel
Robert R. Wyand, III
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.