IP Library Granted Patent US 6,203,637
Granted Patent Utility
US 6,203,637 · App. 09/172,598

Use of a cleaning process, a cleaning process, a connection process and a workpiece pair

Inventors: Alex Dommann, Christoph Benno Luechinger-Bautista, Nicolino Onda, Juergen Ramm, Heinrich Zimmerman
Patented Case View Patent ↗
Granted: Mar 20, 2001 Filed: Oct 15, 1998
Inventors
Alex Dommann
Christoph Benno Luechinger-Bautista
Nicolino Onda
Juergen Ramm
Heinrich Zimmerman
Assignee (at issue)
Unaxis Balzers Aktiengesellschaft

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Quick Facts
Patent No.
US 6,203,637
App. No.
09/172,598
Filed
1998-10-15
Granted
2001-03-20
Kind
A