Granted Patent
Utility
US 6,203,661 · App. 09/457,042
Brim and gas escape for non-contact wafer holder
Inventors:
Oleg Siniaguine, Sergey Savastiouk, Alex Berger
Patented Case
View Patent ↗
Granted: Mar 20, 2001
Filed: Dec 7, 1999
Inventors
Oleg Siniaguine
Sergey Savastiouk
Alex Berger
Assignee (at issue)
Tru-Si Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.