Granted Patent
Utility
US 6,203,684 · App. 09/172,299
Pulse reverse electrodeposition for metallization and planarization of a semiconductor substrates
Inventors:
E. Jennings Taylor, Chengdong Zhou, Jenny J. Sun
Patented Case
View Patent ↗
Granted: Mar 20, 2001
Filed: Oct 14, 1998
Inventors
E. Jennings Taylor
Chengdong Zhou
Jenny J. Sun
Assignee (at issue)
Faraday Technology Marketing Group, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.