Granted Patent
Utility
US 6,204,166 · App. 09/137,525
Method for forming dual damascene structures
Inventor:
Allen McTeer
Patented Case
View Patent ↗
Granted: Mar 20, 2001
Filed: Aug 21, 1998
Inventor
Allen McTeer
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.