Granted Patent
Utility
US 6,204,201 · App. 09/330,709
Method of processing films prior to chemical vapor deposition using electron beam processing
Inventor:
Matthew Ross
Patented Case
View Patent ↗
Granted: Mar 20, 2001
Filed: Jun 11, 1999
Inventor
Matthew Ross
Assignee (at issue)
Electron Vision Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.