Granted Patent
Utility
US 6,204,484 · App. 09/052,506
System for measuring the temperature of a semiconductor wafer during thermal processing
Inventors:
Sing-Pin Tay, Yao Zhi Hu
Patented Case
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Granted: Mar 20, 2001
Filed: Mar 31, 1998
Inventors
Sing-Pin Tay
Yao Zhi Hu
Assignee (at issue)
Steag RTP Systems GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.