IP Library Granted Patent US 6,204,488
Granted Patent Utility
US 6,204,488 · App. 09/450,755

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Inventors: Eiichi Toya, Tomio Konn, Tomohiro Nagata, Norihiko Saito, Sunao Seko, Hideyuki Yokoyama, Ken Nakao, Takanori Saito, Hisaei Osanai, Toshiyuki Makiya
Patented Case View Patent ↗
Granted: Mar 20, 2001 Filed: Nov 30, 1999
Inventors
Eiichi Toya
Tomio Konn
Tomohiro Nagata
Norihiko Saito
Sunao Seko
Hideyuki Yokoyama
Ken Nakao
Takanori Saito
Hisaei Osanai
Toshiyuki Makiya
Assignees (at issue)
Toshiba Ceramics Co., Ltd.
Tokyo Electron Limited

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Quick Facts
Patent No.
US 6,204,488
App. No.
09/450,755
Filed
1999-11-30
Granted
2001-03-20
Kind
A