Granted Patent
Utility
US 6,206,973 · App. 09/480,730
Chemical vapor deposition system and method
Inventors:
Robert J. Bailey, Lisa H. Michael, Thomas E. Kane
Patented Case
View Patent ↗
Granted: Mar 27, 2001
Filed: Jan 6, 2000
Inventors
Robert J. Bailey
Lisa H. Michael
Thomas E. Kane
Assignee (at issue)
Silicon Valley Group, Thermal Systems LLP
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.