Granted Patent
Utility
US 6,207,522 · App. 09/198,285
Formation of thin film capacitors
Inventors:
Andrew Tye Hunt, Tzyy Jiuan Hwang, Helmut G. Hornis, Wen-Yi Lin
Patented Case
View Patent ↗
Granted: Mar 27, 2001
Filed: Nov 23, 1998
Inventors
Andrew Tye Hunt
Tzyy Jiuan Hwang
Helmut G. Hornis
Wen-Yi Lin
Assignee (at issue)
MicroCoating Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.