Granted Patent
Utility
US 6,207,523 · App. 08/887,742
Methods of forming capacitors DRAM arrays, and monolithic integrated circuits
Inventors:
Kunal R. Parekh, John K. Zahurak, Phillip G. Wald
Patented Case
View Patent ↗
Granted: Mar 27, 2001
Filed: Jul 3, 1997
Inventors
Kunal R. Parekh
John K. Zahurak
Phillip G. Wald
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.