IP Library Granted Patent US 6,207,539
Granted Patent Utility
US 6,207,539 · App. 09/093,313

Semiconductor device having field isolating film of which upper surface is flat and method thereof

Inventor: Hidetaka Natsume
Patented Case View Patent ↗
Granted: Mar 27, 2001 Filed: Jun 9, 1998
Inventor
Hidetaka Natsume
Assignee (at issue)
NEC CORPORATION

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Quick Facts
Patent No.
US 6,207,539
App. No.
09/093,313
Filed
1998-06-09
Granted
2001-03-27
Kind
A