Granted Patent
Utility
US 6,207,555 · App. 09/270,536
Electron beam process during dual damascene processing
Inventor:
Matthew Ross
Patented Case
View Patent ↗
Granted: Mar 27, 2001
Filed: Mar 17, 1999
Inventor
Matthew Ross
Assignee (at issue)
Electron Vision Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.