Granted Patent
Utility
US 6,207,562 · App. 09/199,041
Method of forming titanium silicide
Inventor:
Jae-Won Han
Patented Case
View Patent ↗
Granted: Mar 27, 2001
Filed: Nov 24, 1998
Inventor
Jae-Won Han
Assignees (at issue)
Anam Semiconductor
Amkor Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.