Granted Patent
Utility
US 6,207,572 · App. 09/576,064
Reverse linear chemical mechanical polisher with loadable housing
Inventor:
Homayoun Talieh
Patented Case
View Patent ↗
Granted: Mar 27, 2001
Filed: May 22, 2000
Inventor
Homayoun Talieh
Assignee (at issue)
Nutool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.