Granted Patent
Utility
US 6,207,932 · App. 09/222,928
Heater block for heating wafer
Inventor:
Jin-Seock Yoo
Patented Case
View Patent ↗
Granted: Mar 27, 2001
Filed: Dec 30, 1998
Inventor
Jin-Seock Yoo
Assignee (at issue)
Hyundai Electronics Industries Co. Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.