Granted Patent
Utility
US 6,208,033 · App. 09/377,253
Apparatus having titanium silicide and titanium formed by chemical vapor deposition
Inventors:
Trung T. Doan, Gurtej S. Sandhu, Kirk D. Prall, Sujit Sharan
Patented Case
View Patent ↗
Granted: Mar 27, 2001
Filed: Aug 19, 1999
Inventors
Trung T. Doan
Gurtej S. Sandhu
Kirk D. Prall
Sujit Sharan
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.