Granted Patent
Utility
US 6,208,675 · App. 09/141,068
Blower assembly for a pulsed laser system incorporating ceramic bearings
Inventor:
R. Kyle Webb
Patented Case
View Patent ↗
Granted: Mar 27, 2001
Filed: Aug 27, 1998
Inventor
R. Kyle Webb
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.