Granted Patent
Utility
US 6,209,220 · App. 09/438,200
Apparatus for cooling substrates
Inventor:
Ivo Raaijmakers
Patented Case
View Patent ↗
Granted: Apr 3, 2001
Filed: Nov 11, 1999
Inventor
Ivo Raaijmakers
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.