Granted Patent
Utility
US 6,211,528 · App. 09/055,755
Electron beam drawing method in which cell projection manner and variably shaped beam manner are used in combination
Inventor:
Takao Tamura
Patented Case
View Patent ↗
Granted: Apr 3, 2001
Filed: Apr 7, 1998
Inventor
Takao Tamura
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.