Granted Patent
Utility
US 6,211,540 · App. 09/173,035
Semiconductor strain sensor and scanning probe microscope using the semiconductor strain sensor
Inventors:
Hiroshi Takahashi, Nobuhiro Shimizu, Yoshiharu Shirakawabe, Susumu Ichihara, Michel Despont
Patented Case
View Patent ↗
Granted: Apr 3, 2001
Filed: Oct 15, 1998
Inventors
Hiroshi Takahashi
Nobuhiro Shimizu
Yoshiharu Shirakawabe
Susumu Ichihara
Michel Despont
Assignee (at issue)
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.