Granted Patent
Utility
US 6,211,621 · App. 09/272,689
Energy transfer microwave plasma source
Inventors:
James W. Caughran, Terry L. White, Daniel G. Nagal, Sidney Hung Luu
Patented Case
View Patent ↗
Granted: Apr 3, 2001
Filed: Mar 18, 1999
Inventors
James W. Caughran
Terry L. White
Daniel G. Nagal
Sidney Hung Luu
Assignee (at issue)
Gasonics International Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.