Granted Patent
Utility
US 6,213,844 · App. 09/277,261
Method for obtaining a desired film thickness using chemical mechanical polishing
Inventor:
Paul Lenkersdorfer
Patented Case
View Patent ↗
Granted: Apr 10, 2001
Filed: Mar 26, 1999
Inventor
Paul Lenkersdorfer
Assignee (at issue)
SpeedFam-IPEC Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.