Granted Patent
Utility
US 6,214,711 · App. 09/139,583
Method of low angle, low energy physical vapor of alloys including redepositing layers of different compositions in trenches
Inventor:
Yongjun Jeff Hu
Patented Case
View Patent ↗
Granted: Apr 10, 2001
Filed: Aug 25, 1998
Inventor
Yongjun Jeff Hu
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.