Granted Patent
Utility
US 6,214,740 · App. 09/051,815
Semiconductor manufacturing apparatus
Inventors:
Shinichi Imai, Hideo Nikoh, Nobuhiro Jiwari
Patented Case
View Patent ↗
Granted: Apr 10, 2001
Filed: Apr 16, 1998
Inventors
Shinichi Imai
Hideo Nikoh
Nobuhiro Jiwari
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.