Granted Patent
Utility
US 6,218,082 · App. 09/146,257
Method for patterning a photoresist
Inventor:
Hyun Jo Yang
Patented Case
View Patent ↗
Granted: Apr 17, 2001
Filed: Sep 3, 1998
Inventor
Hyun Jo Yang
Assignee (at issue)
Hyundai Electronics Industries Co. Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.