Granted Patent
Utility
US 6,224,465 · App. 08/883,404
Methods and apparatus for chemical mechanical planarization using a microreplicated surface
Inventor:
Stuart L. Meyer
Patented Case
View Patent ↗
Granted: May 1, 2001
Filed: Jun 26, 1997
Inventor
Stuart L. Meyer
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.