Granted Patent
Utility
US 6,225,249 · App. 09/349,710
Aluminum nitride sintered body, method of producing thereof, electrostatic chuck, susceptor, dummy wafer, clamp ring and particle catcher using the same
Inventors:
Mitsuhiro Fujita, Shinichiro Aonuma, Kouji Sano, Shigeko Muramatsu
Patented Case
View Patent ↗
Granted: May 1, 2001
Filed: Jul 8, 1999
Inventors
Mitsuhiro Fujita
Shinichiro Aonuma
Kouji Sano
Shigeko Muramatsu
Assignee (at issue)
Toshiba Ceramics Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.