Granted Patent
Utility
US 6,226,087 · App. 09/253,547
Method for measuring the positions of structures on a mask surface
Inventor:
Carola Blaesing-Bangert
Patented Case
View Patent ↗
Granted: May 1, 2001
Filed: Feb 22, 1999
Inventor
Carola Blaesing-Bangert
Assignee (at issue)
Leica Microsystems Wetzlar GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.