Granted Patent
Utility
US 6,227,950 · App. 09/264,066
Dual purpose handoff station for workpiece polishing machine
Inventors:
Gene Hempel, Mike L. Bowman
Patented Case
View Patent ↗
Granted: May 8, 2001
Filed: Mar 8, 1999
Inventors
Gene Hempel
Mike L. Bowman
Assignee (at issue)
SpeedFam-IPEC Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.